Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7300598 | Substrate processing method and apparatus | Takayuki Toshima, Takehiko Orii | 2007-11-27 |
| 6800546 | Film forming method by radiating a plasma on a surface of a low dielectric constant film | Mitsuaki Iwashita, Hiroki Ohno, Shigeru Kawamura, Masahito Sugiura | 2004-10-05 |
| 6683006 | Film forming method and film forming apparatus | Mitsuaki Iwashita | 2004-01-27 |
| 6656273 | Film forming method and film forming system | Takayuki Toshima, Yoji Mizutani | 2003-12-02 |
| 6551400 | Coating apparatus | Keizo Hasbe, Shuuichi Nishikido, Takayuki Toshima, Kazutoshi Yoshioka | 2003-04-22 |
| 6514073 | Resist processing method and resist processing apparatus | Takayuki Toshima | 2003-02-04 |
| 6503003 | Film forming method and film forming apparatus | Keizo Hasebe, Shuuichi Nishikido, Takayuki Toshima, Kazutoshi Yoshioka | 2003-01-07 |
| 6491452 | Developing method and developing apparatus | Takayuki Toshima, Tsutae Omori | 2002-12-10 |
| 6431258 | Process solution supplying apparatus | Keizo Hirose | 2002-08-13 |
| 6385805 | Scrubbing apparatus | Kenji Sekiguchi, Keizo Hirose | 2002-05-14 |
| 6383291 | Process solution supplying apparatus | — | 2002-05-07 |
| 6300043 | Method of forming resist film | Keizo Hirose | 2001-10-09 |
| 6257778 | Method for developing front surface of substrate with improved developing function of developing solution and apparatus thereof | Takayuki Toshima | 2001-07-10 |
| 6238848 | Developing method and developing apparatus | Takayuki Toshima, Tsutae Omori | 2001-05-29 |
| 6228561 | Film forming method and film forming apparatus | Keizo Hasebe, Shuuichi Nishikido, Takayuki Toshima, Kazutoshi Yoshioka | 2001-05-08 |
| 6165270 | Process solution supplying apparatus | Keizo Hirose | 2000-12-26 |
| 6143478 | Resist processing method | Takayuki Toshima | 2000-11-07 |
| 6120361 | Polishing apparatus, polishing member | Mitsuaki Iwashita | 2000-09-19 |
| 6106369 | Polishing system | Mitsuaki Iwashita | 2000-08-22 |
| 6053977 | Coating apparatus | — | 2000-04-25 |
| 6012858 | Apparatus and method for forming liquid film | Keizo Hirose | 2000-01-11 |
| 6001739 | Method of manufacturing a semiconductor device | — | 1999-12-14 |
| 5826129 | Substrate processing system | Keizo Hasebe, Shinji Nagashima, Norio Semba, Masami Akimoto, Yoshio Kimura +3 more | 1998-10-20 |
| 5722875 | Method and apparatus for polishing | Mitsuaki Iwashita, Gerald A. Krulik, Gary Cohrt | 1998-03-03 |
| 5608943 | Apparatus for removing process liquid | Kenji Sekiguchi | 1997-03-11 |