Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406862 | Vacuum processing apparatus and oxidizing gas removal method | Hirokazu Ueda, Yoji IIZUKA, Mitsuaki Iwashita, Antonio Luis Pacheco Rotondaro, Dipak Aryal +5 more | 2025-09-02 |
| 12203021 | Substrate processing device and etching liquid | Koukichi Hiroshiro, Tetsuya Sakazaki, Koji Kagawa, Kazuyoshi Mizumoto | 2025-01-21 |
| 11865590 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Tsunenaga Nakashima, Shuuichi Nishikido, Masato Nakajo +1 more | 2024-01-09 |
| 11538679 | Substrate processing method and substrate processing apparatus | Yuji Katagiri | 2022-12-27 |
| 11504751 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Tsunenaga Nakashima, Shuuichi Nishikido, Masato Nakajo +1 more | 2022-11-22 |
| 11306249 | Substrate processing method, substrate processing device and etching liquid | Koukichi Hiroshiro, Tetsuya Sakazaki, Koji Kagawa, Kazuyoshi Mizumoto | 2022-04-19 |
| 11211281 | Substrate processing apparatus and substrate processing method | — | 2021-12-28 |
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Itaru Kanno, Hiromi Kiyose, Gentaro Goshi, Naohiko Hamamura, Takuro Masuzumi +2 more | 2021-12-14 |
| 11049723 | Substrate processing method and substrate processing apparatus | Koukichi Hiroshiro, Rintaro Higuchi, Koji Kagawa | 2021-06-29 |
| 10734255 | Substrate cleaning method, substrate cleaning system and memory medium | Itaru Kanno, Meitoku Aibara, Kouzou Tachibana | 2020-08-04 |
| 9352653 | Circuit breaking unit and railcar including the same | Hiroyuki Kawasaki, Hiroyuki Sakurai, Ryoji Negi, Shin Imanishi, Nobuyuki Sema | 2016-05-31 |
| 9111967 | Liquid processing method, liquid processing apparatus and storage medium | Yasushi Fujii, Tetsuya Sakazaki | 2015-08-18 |
| 8794250 | Substrate processing method and substrate processing apparatus | Takehiko Orii, Noritaka Uchida, Satoru Tanaka, Hiroki Ohno | 2014-08-05 |
| 8651121 | Substrate processing apparatus, substrate processing method, and storage medium | Takehiko Orii | 2014-02-18 |
| 8475668 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein | Hiroshi Tanaka, Teruomi Minami, Yosuke Kawabuchi, Norihiro Ito, Fumihiro Kamimura +4 more | 2013-07-02 |
| 8337659 | Substrate processing method and substrate processing apparatus | Takehiko Orii, Noritaka Uchida, Satoru Tanaka, Hiroki Ohno | 2012-12-25 |
| 8197606 | Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage medium | Tsukasa Watanabe, Naoki Shindo, Hiroki Ohno | 2012-06-12 |
| 8147617 | Substrate cleaning method and computer readable storage medium | Hiroki Ohno | 2012-04-03 |
| 8137478 | Substrate processing method and substrate processing apparatus | Noritaka Uchida, Satoru Tanaka, Hiroki Ohno | 2012-03-20 |
| 8056257 | Substrate processing apparatus and substrate processing method | Hiroki Ohno | 2011-11-15 |
| 8037891 | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus | Itaru Kanno, Yusaku Hirota, Hiroshi Nagayasu, Shouichi Shimose | 2011-10-18 |
| 7837804 | Substrate cleaning method, substrate cleaning equipment, computer program, and program recording medium | Hiroki Ohno | 2010-11-23 |
| 7806989 | Substrate processing method and substrate processing apparatus | Noritaka Uchida, Satoru Tanaka, Hiroki Ohno | 2010-10-05 |
| 7803230 | Substrate cleaning apparatus, substrate cleaning method, and medium for recording program used for the method | Masaru Amai, Takehiko Orii, Hiroki Ohno, Satoru Tanaka, Takuya Mori | 2010-09-28 |
| 7691210 | Resist film removing method | Takehiko Orii, Tadashi Iino | 2010-04-06 |