Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367630 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Meitoku Aibara, Satoru Tanaka | 2022-06-21 |
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Hiromi Kiyose, Gentaro Goshi, Naohiko Hamamura, Takuro Masuzumi, Kenji Sekiguchi +2 more | 2021-12-14 |
| 10998183 | Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium | Miyako Kaneko, Takehiko Orii, Satoru Shimura, Masami Yamashita | 2021-05-04 |
| 10835908 | Substrate processing method | Miyako Kaneko, Takehiko Orii | 2020-11-17 |
| 10811283 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Meitoku Aibara, Satoru Tanaka | 2020-10-20 |
| 10792711 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Kenji Mochida +1 more | 2020-10-06 |
| 10734255 | Substrate cleaning method, substrate cleaning system and memory medium | Kenji Sekiguchi, Meitoku Aibara, Kouzou Tachibana | 2020-08-04 |
| 10272478 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Kenji Mochida +1 more | 2019-04-30 |
| 10242889 | Substrate liquid processing method and substrate liquid processing apparatus | Jun Nonaka | 2019-03-26 |
| 10083845 | Substrate processing apparatus, substrate processing method and storage medium | — | 2018-09-25 |
| 10043652 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii | 2018-08-07 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Meitoku Aibara, Satoru Tanaka | 2018-04-24 |
| 9818598 | Substrate cleaning method and recording medium | Meitoku Aibara, Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Kenji Mochida +1 more | 2017-11-14 |
| 9799538 | Substrate cleaning system | Miyako Kaneko, Takehiko Orii | 2017-10-24 |
| 9443712 | Substrate cleaning method and substrate cleaning system | Miyako Kaneko, Takehiko Orii | 2016-09-13 |
| 9378940 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Norihiro Ito, Yosuke Hachiya, Jun Nogami, Kotaro Ooishi | 2016-06-28 |
| 9362184 | Semiconductor device, manufacturing method of semiconductor device, semiconductor manufacturing and inspecting apparatus, and inspecting apparatus | Takahiko Kato, Hiroshi Nakano, Haruo Akahoshi, Yuuji Takada, Yoshimi Sudo +3 more | 2016-06-07 |
| 8946895 | Semiconductor device, manufacturing method of semiconductor device, semiconductor manufacturing and inspecting apparatus, and inspecting apparatus | Takahiko Kato, Hiroshi Nakano, Haruo Akahoshi, Yuuji Takada, Yoshimi Sudo +3 more | 2015-02-03 |
| 8569136 | Manufacturing method of semiconductor device | — | 2013-10-29 |
| 8037891 | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus | Yusaku Hirota, Kenji Sekiguchi, Hiroshi Nagayasu, Shouichi Shimose | 2011-10-18 |
| 7537987 | Semiconductor device manufacturing method | Masahiko Higashi, Satoshi Kume, Jiro Yugami, Shinichi Yamanari, Takahiro Maruyama | 2009-05-26 |
| 7250391 | Cleaning composition for removing resists and method of manufacturing semiconductor device | Yasuhiro Asaoka, Masahiko Higashi, Yoshiharu Hidaka, Etsuro Kishio, Tetsuo Aoyama +3 more | 2007-07-31 |
| 6730239 | Cleaning agent for semiconductor device & method of fabricating semiconductor device | Naoki Yokoi, Hiroshi Morita, Naoki Ichiki, Hideaki Nezu, Masayuki Takashima | 2004-05-04 |
| 6713232 | Method of manufacturing semiconductor device with improved removal of resist residues | Seiji Muranaka, Mami Shirota, Junji Kondo | 2004-03-30 |
| 6708903 | Two-fluid cleaning jet nozzle, cleaning equipment and method of fabricating semiconductor device employing the same | — | 2004-03-23 |