Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Itaru Kanno, Hiromi Kiyose, Gentaro Goshi, Naohiko Hamamura, Kenji Sekiguchi +2 more | 2021-12-14 |
| 11133176 | Substrate processing method, recording medium and substrate processing system | Kento Tsukano, Gentaro Goshi, Hiromi Kiyose, Shogo Fukui | 2021-09-28 |
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Gentaro Goshi, Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi +3 more | 2021-03-16 |
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Kouzou Tachibana, Mitsunori Nakamori, Kotaro Ooishi, Keisuke Egashira +6 more | 2020-12-15 |
| 10727042 | Liquid processing method, substrate processing apparatus and recording medium | Mitsunori Nakamori, Yosuke Kawabuchi, Koji Yamashita, Shozou Maeda | 2020-07-28 |
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Gentaro Goshi, Keisuke Egashira, Hiroki Ohno, Hiroshi Marumoto +2 more | 2020-06-23 |
| 10504718 | Substrate processing apparatus, substrate processing method, and storage medium | Hiroki Ohno, Keisuke Egashira, Gentaro Goshi, Yosuke Kawabuchi, Shotaro Kitayama +3 more | 2019-12-10 |
| 10395950 | Substrate processing apparatus, substrate processing method, and recording medium | Gentaro Goshi, Keisuke Egashira, Yosuke Kawabuchi, Hiromi Kiyose, Hiroki Ohno +3 more | 2019-08-27 |
| 10261521 | Processing apparatus, processing method, and storage medium | Keigo Satake, Kenji Nakamizo, Yuichi Douki | 2019-04-16 |