Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11938524 | Substrate processing apparatus and substrate processing method | Jun Nonaka | 2024-03-26 |
| 11935736 | Substrate processing method and substrate processing apparatus | Rintaro Higuchi, Tsunemoto Ogata | 2024-03-19 |
| 11723259 | Substrate processing apparatus and method of processing substrate | Koukichi Hiroshiro, Jun Nonaka, Kazuya Koyama | 2023-08-08 |
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Kouzou Tachibana, Kotaro Ooishi, Keisuke Egashira, Koji Tanaka +6 more | 2020-12-15 |
| 10727042 | Liquid processing method, substrate processing apparatus and recording medium | Yosuke Kawabuchi, Takuro Masuzumi, Koji Yamashita, Shozou Maeda | 2020-07-28 |
| 10366877 | Substrate processing method and substrate processing apparatus | Keisuke Egashira | 2019-07-30 |
| 10026629 | Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program | Junichi Kitano, Teruomi Minami | 2018-07-17 |
| 9953840 | Substrate processing method and substrate processing system | Hiroshi Marumoto, Hisashi Kawano, Hiromi Kiyose, Kazuyuki Mitsuoka | 2018-04-24 |
| 9095953 | Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrate | Noritaka Uchida, Takehiko Orii, Takanori Miyazaki, Nobuhiko Mouri | 2015-08-04 |
| 8978671 | Substrate processing method and substrate processing apparatus | Satoru Tanaka, Takehiko Orii, Hirotaka Maruyama, Teruomi Minami | 2015-03-17 |
| 8617656 | Liquid processing apparatus, liquid processing method, and storage medium | Akira Fujita, Takayuki Toshima | 2013-12-31 |
| 8043469 | Substrate processing method, substrate processing apparatus, and storage medium | Yusuke Saito, Akira Ishihara, Satoru Tanaka, Yuji Murakami | 2011-10-25 |
| 7914626 | Liquid processing method and liquid processing apparatus | Noritaka Uchida | 2011-03-29 |
| 7767006 | Ozone processing apparatus and ozone processing method | Yoshichika Tokuno, Norihiro Ito, Takehiko Orii, Tadashi Iino, Hiroki Ohno +1 more | 2010-08-03 |
| 7731799 | Substrate processing method, substrate processing apparatus and computer-readable memory medium | Takayuki Toshima, Tadashi Iino, Yusuke Saito, Noritaka Uchida, Takehiko Orii | 2010-06-08 |
| 7693597 | Computer readable storage medium for controlling substrate processing apparatus | Tadashi Iino, Noritaka Uchida, Takehiko Orii | 2010-04-06 |
| 6979655 | Substrate processing method and substrate processing apparatus | Takayuki Niuya, Takehiko Orii, Hiroyuki Mori, Hiroshi Yano | 2005-12-27 |
| 6863741 | Cleaning processing method and cleaning processing apparatus | Takehiko Orii | 2005-03-08 |
| 6589338 | Device for processing substrate | Hiroki Taniyama, Takanori Miyazaki | 2003-07-08 |
| 6348157 | Cleaning method | Tadahiro Ohmi, Takahisa Nitta, Kazuhiko Kawada, Toshihiro II | 2002-02-19 |