Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424141 | Substrate processing apparatus, substrate processing method and recording medium | Jian Zhang, Takao Inada, Seigo Fujitsu, Hideaki Sato, Teruaki Konishi +3 more | 2022-08-23 |
| 11087992 | Substrate processing method and substrate processing apparatus | Tsukasa Hirayama, Takao Inada, Hironobu Hyakutake, Kazuya Koyama | 2021-08-10 |
| 11075096 | Substrate processing apparatus | Takao Inada, Hironobu Hyakutake | 2021-07-27 |
| 10923368 | Substrate processing apparatus, substrate processing method, and storage medium | Takao Inada, Hiroki Ohno | 2021-02-16 |
| 10792711 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2020-10-06 |
| 10651061 | Substrate processing apparatus, substrate processing method and recording medium | Hiroki Ohno, Takao Inada | 2020-05-12 |
| 10272478 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2019-04-30 |
| 10192758 | Substrate processing apparatus | Yosuke Kawabuchi, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi, Kazuyoshi Shinohara +1 more | 2019-01-29 |
| 10121646 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Meitoku Aibara, Yuki Yoshida | 2018-11-06 |
| 10062586 | Chemical fluid processing apparatus and chemical fluid processing method | Derek Bassett, Wallace P. Printz, Gentaro Goshi, Yoshihiro Kai | 2018-08-28 |
| 9953840 | Substrate processing method and substrate processing system | Hiroshi Marumoto, Hiromi Kiyose, Mitsunori Nakamori, Kazuyuki Mitsuoka | 2018-04-24 |
| 9922849 | Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof | Yasuyuki Ido, Naoki Shindo, Takehiko Orii, Keisuke Egashira, Yosuke Hachiya +2 more | 2018-03-20 |
| 9870914 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Meitoku Aibara, Yuki Yoshida | 2018-01-16 |
| 9818598 | Substrate cleaning method and recording medium | Meitoku Aibara, Yuki Yoshida, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2017-11-14 |
| 9805957 | Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing program | Yosuke Kawabuchi, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi, Kazuyoshi Shinohara +1 more | 2017-10-31 |
| 9378940 | Substrate processing apparatus and substrate processing method | Norihiro Ito, Yosuke Hachiya, Jun Nogami, Kotaro Ooishi, Itaru Kanno | 2016-06-28 |
| 7924396 | Coating/developing apparatus and pattern forming method | Junichi Kitano, Hitoshi Kosugi, Koichi Hontake, Masashi Enomoto | 2011-04-12 |