Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11799405 | Control device for AC rotary machine and control method for AC rotary machine | Masato Ito, Akihiro Maruyama, Kunihiro Kawahara | 2023-10-24 |
| 11488849 | Substrate processing apparatus with resistance value varying mechanism | Yusuke Hashimoto, Tadashi Iino | 2022-11-01 |
| 11081985 | Synchronous rotating machine control device and machine learning device | — | 2021-08-03 |
| 10411633 | Control device for AC rotating machine | Masato Ito, Hisanori Yamasaki, Akira Satake | 2019-09-10 |
| 10348230 | Control device for AC rotary machine and magnetic-pole-position correction amount calculation method | Kunihiro Kawahara | 2019-07-09 |
| 9922849 | Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof | Yasuyuki Ido, Naoki Shindo, Takehiko Orii, Keisuke Egashira, Kotaro Ooishi +2 more | 2018-03-20 |
| 9768010 | Liquid treatment apparatus | Norihiro Ito, Kazuhiro Aiura, Naoki Shindo | 2017-09-19 |
| 9691602 | Liquid process apparatus and liquid process method | Norihiro Ito, Kazuhiro Aiura, Naoki Shindo, Takashi Nagai | 2017-06-27 |
| 9553532 | Control device for alternating current rotary machine | Masato Ito, Satoru Terashima | 2017-01-24 |
| 9378940 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Norihiro Ito, Jun Nogami, Kotaro Ooishi, Itaru Kanno | 2016-06-28 |
| 9231510 | Control device for rotary machine and inductance measurement method for rotary machine | Tetsuya Kojima, Shoji Adachi | 2016-01-05 |
| 9231511 | Control device of AC rotating machine | Masato Ito, Satoru Terashima | 2016-01-05 |
| 9224624 | Liquid processing method | Takao Inada, Naoyuki Okamura, Hidetsugu Yano | 2015-12-29 |
| 9190311 | Liquid arm cleaning unit for substrate processing apparatus | Jiro Higashijima, Kazuhiro Aiura, Norihiro Itoh, Naoki Shindo, Yuki Ito | 2015-11-17 |
| 9177838 | Liquid process apparatus and liquid process method | Norihiro Ito, Kazuhiro Aiura, Naoki Shindo, Takashi Nagai | 2015-11-03 |
| 8951359 | Liquid processing apparatus, liquid processing method and computer-readable storage medium storing liquid processing program | Takao Inada, Naoyuki Okamura, Hidetsugu Yano | 2015-02-10 |