Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148632 | Substrate processing apparatus and cleaning method of mist guard | Yusuke Hashimoto, Daisuke Goto, Kanta Mori, Nobuhiro Ogata | 2024-11-19 |
| 11715650 | Substrate processing apparatus and manufacturing method therefor | Yusuke Hashimoto | 2023-08-01 |
| 11574827 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Yoshihiro Kai, Yoichi Tokunaga, Nobuhiro Ogata | 2023-02-07 |
| 11430673 | Substrate processing apparatus and substrate processing method | Yusuke Hashimoto | 2022-08-30 |
| 11158525 | Substrate processing apparatus and substrate processing method | Yasuhiro Takaki, Shinichi Umeno, Takashi Nagai, Hisashi MORITA, Nobuhiro Ogata +1 more | 2021-10-26 |
| 11056335 | Substrate processing apparatus | Nobuhiro Ogata, Yusuke Hashimoto | 2021-07-06 |
| 11024518 | Substrate processing apparatus, substrate processing method and recording medium | Norihiro Ito, Nobuhiro Ogata, Takahisa Otsuka, Yuichi Douki, Yusuke Hashimoto +2 more | 2021-06-01 |
| 10486208 | Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium | Nobuhiro Ogata, Norihiro Ito, Yusuke Hashimoto, Kazuhiro Aiura | 2019-11-26 |
| 10475671 | Substrate processing apparatus and method of cleaning substrate processing apparatus | Nobuhiro Ogata, Yusuke Hashimoto | 2019-11-12 |
| 10297473 | Liquid processing apparatus | Terufumi Wakiyama, Norihiro Ito | 2019-05-21 |
| 10276425 | Substrate processing system | Terufumi Wakiyama, Norihiro Ito, Satoshi Biwa | 2019-04-30 |
| 9953848 | Substrate liquid processing apparatus | Terufumi Wakiyama, Norihiro Ito | 2018-04-24 |
| 9953852 | Liquid processing aparatus | Yuichi Douki, Masami Akimoto, Shigehisa Inoue | 2018-04-24 |
| 9933702 | Substrate processing apparatus | Nobuhiro Ogata | 2018-04-03 |
| 9818626 | Substrate processing apparatus and substrate processing method | Yoshifumi Amano, Eiichiro Okamoto, Yuki Ito | 2017-11-14 |
| 9793142 | Substrate processing apparatus and substrate processing method | Yoshifumi Amano, Eiichiro Okamoto, Yuki Ito | 2017-10-17 |
| 9773687 | Liquid processing apparatus | Terufumi Wakiyama, Norihiro Ito | 2017-09-26 |
| 9508569 | Substrate liquid processing apparatus | Shigehisa Inoue, Masami Akimoto | 2016-11-29 |
| 9396975 | Liquid treatment apparatus and method | Norihiro Itoh | 2016-07-19 |
| 9355871 | Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup | Norihiro Ito, Nobuhiro Ogata, Shuichi Nagamine | 2016-05-31 |
| 9190311 | Liquid arm cleaning unit for substrate processing apparatus | Yosuke Hachiya, Kazuhiro Aiura, Norihiro Itoh, Naoki Shindo, Yuki Ito | 2015-11-17 |
| 9159594 | Liquid processing apparatus and liquid processing method | — | 2015-10-13 |
| 9048269 | Substrate liquid treatment apparatus with lift pin plate | Nobuhiro Ogata, Satoshi Kaneko, Shuichi Nagamine, Yoshihiro Kai | 2015-06-02 |
| 9022045 | Substrate liquid cleaning apparatus with controlled liquid port ejection angle | Nobuhiro Ogata, Satoshi Kaneko, Shuichi Nagamine, Yoshihiro Kai | 2015-05-05 |
| 8944081 | Liquid processing apparatus and liquid processing method | — | 2015-02-03 |