Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300524 | Substrate processing system | Satoshi Morita, Ryoji Ikebe, Isamu Miyamoto | 2025-05-13 |
| 12176224 | Substrate processing apparatus and substrate processing method | Kazuhiro Aiura | 2024-12-24 |
| 12142496 | Substrate processing apparatus and substrate processing method | Kazuhiro Aiura | 2024-11-12 |
| 12133297 | Substrate processing apparatus | Akira Fujita | 2024-10-29 |
| 11776824 | Processing liquid ejection nozzle, nozzle arm, substrate processing apparatus, and substrate processing method | Kazuhiro Aiura, Tatsuhiro Ueki | 2023-10-03 |
| 11437252 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoichi Tokunaga | 2022-09-06 |
| D934991 | Component of a liquid discharge nozzle for semiconductor substrate processing apparatus | Kazuhiro Aiura | 2021-11-02 |
| D930796 | Liquid discharge nozzle for semiconductor substrate processing apparatus | Kazuhiro Aiura | 2021-09-14 |
| D929534 | Liquid discharge nozzle for semiconductor substrate processing apparatus | Kazuhiro Aiura | 2021-08-31 |
| 11069546 | Substrate processing system | — | 2021-07-20 |
| 11018035 | Substrate processing system | Satoshi Morita, Ryoji Ikebe, Isamu Miyamoto | 2021-05-25 |
| 11011436 | Substrate processing apparatus, control method of substrate processing apparatus and substrate processing system | Satoshi Morita, Ryoji Ikebe, Isamu Miyamoto | 2021-05-18 |
| 10713772 | Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium | Yuki Ito, Eiichiro Okamoto, Kazuya Iwanaga, Ryoji Ikebe | 2020-07-14 |
| 10707102 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoichi Tokunaga | 2020-07-07 |
| 10643865 | Substrate cleaning apparatus | Yuki Ito, Kento Kurusu | 2020-05-05 |
| 10217628 | Substrate processing apparatus and processing method of substrate processing apparatus | Satoshi Morita, Ryoji Ikebe, Isamu Miyamoto | 2019-02-26 |
| 10128137 | Management method of substrate processing apparatus and substrate processing system | Satoshi Morita, Ryoji Ikebe, Isamu Miyamoto | 2018-11-13 |
| 10046372 | Liquid processing apparatus | Kazuya Goda, Nobuya Yamamoto, Go Ayabe | 2018-08-14 |
| 9895711 | Substrate liquid processing apparatus, substrate liquid processing method and substrate processing apparatus | Jian Zhang, Eiichiro Okamoto, Yuki Ito | 2018-02-20 |
| 9859136 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoichi Tokunaga | 2018-01-02 |
| 9818626 | Substrate processing apparatus and substrate processing method | Jiro Higashijima, Eiichiro Okamoto, Yuki Ito | 2017-11-14 |
| 9793142 | Substrate processing apparatus and substrate processing method | Jiro Higashijima, Eiichiro Okamoto, Yuki Ito | 2017-10-17 |
| 9782807 | Substrate processing system, method for controlling substrate processing system, and storage medium | Yuki Ito, Eiichiro Okamoto | 2017-10-10 |
| 9623434 | Substrate processing apparatus | — | 2017-04-18 |
| 9564347 | Liquid processing apparatus and liquid processing method | Satoshi Kaneko | 2017-02-07 |