Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437252 | Substrate processing apparatus and substrate processing method | Fitrianto, Yoichi Tokunaga, Yoshifumi Amano | 2022-09-06 |
| 10707102 | Substrate processing apparatus and substrate processing method | Fitrianto, Yoichi Tokunaga, Yoshifumi Amano | 2020-07-07 |
| 9859136 | Substrate processing apparatus and substrate processing method | Fitrianto, Yoichi Tokunaga, Yoshifumi Amano | 2018-01-02 |
| 9508567 | Cleaning jig and cleaning method for cleaning substrate processing apparatus, and substrate processing system | — | 2016-11-29 |
| 9165800 | Liquid processing method, liquid processing apparatus and storage medium | — | 2015-10-20 |
| 8828183 | Substrate processing apparatus and substrate processing method | Yoshifumi Fitrianto, Yoichi Tokunaga, Yoshifumi Amano | 2014-09-09 |
| 8815112 | Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatus | Tsuyoshi Mizuno, Yuichiro Morozumi, Shingo Hishiya, Katsushige Harada, Fumiaki Hayase | 2014-08-26 |
| 8696863 | Liquid processing apparatus and liquid processing method | Jiro Higashijima | 2014-04-15 |
| 8590547 | Liquid processing apparatus | Jiro Higashijima | 2013-11-26 |
| 8567339 | Liquid processing apparatus | Jiro Higashijima | 2013-10-29 |
| 8529707 | Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein | — | 2013-09-10 |
| 8398817 | Chemical-liquid processing apparatus and chemical-liquid processing method | Jiro Higashijima | 2013-03-19 |