Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10643835 | Substrate processing apparatus, liquid processing method, and storage medium | Akira Fujita | 2020-05-05 |
| 9252009 | Liquid processing apparatus | — | 2016-02-02 |
| 8864933 | Substrate treatment apparatus and substrate treatment method | Shouichi Terada, Takeshi Uehara | 2014-10-21 |
| 8815112 | Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatus | Hiromitsu Namba, Yuichiro Morozumi, Shingo Hishiya, Katsushige Harada, Fumiaki Hayase | 2014-08-26 |
| 8684014 | Liquid processing apparatus for substrate and liquid processing method | Yoshifumi Amano | 2014-04-01 |
| 8192796 | Substrate processing apparatus and substrate processing method | Hiroshi Shinya, Shouichi Terada, Yukihiro Wakamoto | 2012-06-05 |
| 7968468 | Substrate treatment apparatus and substrate treatment method | Shouichi Terada, Takeshi Uehara | 2011-06-28 |
| 7926444 | Method for forming thin film and film-forming device | Shouichi Terada, Takeshi Uehara | 2011-04-19 |
| 7910157 | Substrate processing method and program | Shouichi Terada, Takeshi Uehara | 2011-03-22 |
| 7757626 | Substrate processing apparatus and substrate processing method | Hiroshi Shinya, Shouichi Terada, Yukihiro Wakamoto | 2010-07-20 |
| 7757625 | Method for forming thin film and film-forming device | Shouichi Terada, Takeshi Uehara | 2010-07-20 |
| 7497908 | Film coating unit and film coating method | Yuuichi Mikata, Kimihide Saito | 2009-03-03 |
| 7416474 | Planarization apparatus | Shouichi Terada, Takeshi Uehara | 2008-08-26 |
| 7322496 | Brick body for rotary nozzle | Tomohiro Yotabunn, Hideto Takasugi, Tsuneo Kondo, Hisao Inubushi | 2008-01-29 |
| 7290685 | Nozzle plate for a sliding nozzle apparatus | Tomohiro Yotabun, Tsuyoshi Yoshida | 2007-11-06 |
| D546849 | Sliding nozzle plate | Tomohiro Yotabun, Tsuyoshi Yoshida | 2007-07-17 |
| 6878401 | Substrate processing method | Kazuhiro Nishijima | 2005-04-12 |
| 6634033 | Rotating damper | Kazuyoshi Oshima, Youjirou Nakayama | 2003-10-21 |
| 5010349 | Plane patch antenna | Motoki Hirano | 1991-04-23 |
| 4939834 | Machine tool with tool change mechanism | Hisamitsu Kawasaki, Kunimichi Nakashima, Kazunori Araki | 1990-07-10 |
| 4252480 | Throw away insert and end mills | Shigetada Yoneyama | 1981-02-24 |