Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8864933 | Substrate treatment apparatus and substrate treatment method | Tsuyoshi Mizuno, Takeshi Uehara | 2014-10-21 |
| 8192796 | Substrate processing apparatus and substrate processing method | Hiroshi Shinya, Tsuyoshi Mizuno, Yukihiro Wakamoto | 2012-06-05 |
| 8084372 | Substrate processing method and computer storage medium | Gen You, Makoto Muramatsu, Hiroyuki Fujii, Takanori Nishi | 2011-12-27 |
| 7968468 | Substrate treatment apparatus and substrate treatment method | Tsuyoshi Mizuno, Takeshi Uehara | 2011-06-28 |
| 7926444 | Method for forming thin film and film-forming device | Tsuyoshi Mizuno, Takeshi Uehara | 2011-04-19 |
| 7910157 | Substrate processing method and program | Tsuyoshi Mizuno, Takeshi Uehara | 2011-03-22 |
| 7757625 | Method for forming thin film and film-forming device | Tsuyoshi Mizuno, Takeshi Uehara | 2010-07-20 |
| 7757626 | Substrate processing apparatus and substrate processing method | Hiroshi Shinya, Tsuyoshi Mizuno, Yukihiro Wakamoto | 2010-07-20 |
| 7416474 | Planarization apparatus | Tsuyoshi Mizuno, Takeshi Uehara | 2008-08-26 |
| 7316515 | Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid | Nobuyuki Sata | 2008-01-08 |