Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8782918 | Heat processing apparatus and heat processing method | Shigeki Aoki, Yuichi Sakai, Mitsuo Yamashita | 2014-07-22 |
| 8192796 | Substrate processing apparatus and substrate processing method | Shouichi Terada, Tsuyoshi Mizuno, Yukihiro Wakamoto | 2012-06-05 |
| 7980003 | Heat processing apparatus and heat processing method | Shigeki Aoki, Yuichi Sakai, Mitsuo Yamashita | 2011-07-19 |
| 7757626 | Substrate processing apparatus and substrate processing method | Shouichi Terada, Tsuyoshi Mizuno, Yukihiro Wakamoto | 2010-07-20 |
| 7385849 | Semiconductor integrated circuit device | Mitsuhiro Koga | 2008-06-10 |
| 7266759 | Semiconductor integrated circuit device and error checking and correcting method thereof | Mitsuhiro Koga | 2007-09-04 |
| 7223945 | Substrate heating method, substrate heating system, and applying developing system | Takahiro Kitano | 2007-05-29 |
| 7060939 | Substrate heating method, substrate heating system, and applying developing system | Takahiro Kitano | 2006-06-13 |
| 7050710 | Thermal treatment equipment and thermal treatment method | Yasutaka Souma, Takahiro Kitano | 2006-05-23 |
| 7024798 | Low-pressure dryer and low-pressure drying method | Tomohide Minami, Takahiro Kitano | 2006-04-11 |
| 6986214 | Low-pressure dryer and low-pressure drying method | Tomohide Minami, Takahiro Kitano | 2006-01-17 |
| 6957378 | Semiconductor memory device | Mitsuhiro Koga, Munehiro Yoshida | 2005-10-18 |
| 6796054 | Low-pressure dryer and low-pressure drying method | Tomohide Minami, Takahiro Kitano | 2004-09-28 |
| 6573031 | Apparatus and method of thermal processing and method of pattern formation | Kazuyoshi Mizumoto, Kazuhisa Hayashida, Eiichi Sekimoto | 2003-06-03 |
| 6570801 | Semiconductor memory having refresh function | Munehiro Yoshida | 2003-05-27 |
| 5928390 | Vertical processing apparatus | Hidetami Yaegashi, Takayuki Toshima, Masami Akimoto, Eiji Yamaguchi, Junichi Kitano +2 more | 1999-07-27 |
| 5876280 | Substrate treating system and substrate treating method | Junichi Kitano, Takayuki Katano, Hidetami Yaegashi, Yasunori Kawakami, Fumihiko Kawano | 1999-03-02 |
| 4849653 | Semiconductor circuit device for preventing an output of a bistable circuit from becoming unstable | Kimimasa Imai | 1989-07-18 |