YS

Yasutaka Souma

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,546,620 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
8562753 Nozzle cleaning method and a computer-readable storage medium storing nozzle cleaning program Takeshi Hirao, Akihiro Fujimoto 2013-10-22
7891365 Nozzle cleaning apparatus, nozzle cleaning method, and a computer-readable storage medium storing nozzle cleaning program Takeshi Hirao, Akihiro Fujimoto 2011-02-22
7050710 Thermal treatment equipment and thermal treatment method Hiroshi Shinya, Takahiro Kitano 2006-05-23