Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7401988 | Substrate processing apparatus and substrate processing method | Hidefumi Matsui, Junichi Kitano, Yo Suzuki, Masami Yamashita, Toru Aoyama +2 more | 2008-07-22 |
| 7208066 | Substrate processing apparatus and substrate processing method | Junichi Kitano, Yuji Matsuyama, Takahiro Kitano, Hidefumi Matsui, Yo Suzuki +7 more | 2007-04-24 |
| 6617095 | Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist pattern | Junichi Kitano, Keiko Hada, Yuko Ono, Hidefumi Matsui | 2003-09-09 |
| 6485203 | Substrate processing method and substrate processing apparatus | Hidefumi Matsui, Junichi Kitano, Yo Suzuki, Masami Yamashita, Toru Aoyama +2 more | 2002-11-26 |
| 6333003 | Treatment apparatus, treatment method, and impurity removing apparatus | Junichi Kitano, Masami Akimoto, Norio Semba | 2001-12-25 |
| 6097469 | Method of processing resist onto substrate and resist processing apparatus | Hidetami Yaegashi, Yasunori Kawakami, Jae Hoon Park, Keiko Kanzawa, Takayuki Toshima +1 more | 2000-08-01 |
| 6063439 | Processing apparatus and method using solution | Norio Semba, Junichi Kitano | 2000-05-16 |
| 6017663 | Method of processing resist utilizing alkaline component monitoring | Hidetami Yaegashi, Yasunori Kawakami, Jae Hoon Park, Keiko Kanzawa, Takayuki Toshima +1 more | 2000-01-25 |
| 5944894 | Substrate treatment system | Junichi Kitano, Keiko Kanzawa, Masami Akimoto, Norio Semba | 1999-08-31 |
| 5932380 | Method of processing resist utilizing alkaline component monitoring | Hidetami Yaegashi, Yasunori Kawakami, Jae Hoon Park, Keiko Kanzawa, Takayuki Toshima +1 more | 1999-08-03 |
| 5928390 | Vertical processing apparatus | Hidetami Yaegashi, Takayuki Toshima, Masami Akimoto, Eiji Yamaguchi, Junichi Kitano +2 more | 1999-07-27 |
| 5876280 | Substrate treating system and substrate treating method | Junichi Kitano, Hiroshi Shinya, Hidetami Yaegashi, Yasunori Kawakami, Fumihiko Kawano | 1999-03-02 |