Issued Patents All Time
Showing 1–25 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398461 | Substrate cleaning apparatus and substrate cleaning method | Tsunenaga Nakashima | 2025-08-26 |
| 12276027 | Substrate processing apparatus and substrate processing method | Katsuhiro Morikawa, Mitsuaki Iwashita, Satoshi Kaneko | 2025-04-15 |
| 12131919 | Substrate cleaning apparatus and substrate cleaning method | Tsunenaga Nakashima | 2024-10-29 |
| 11637035 | Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereof | Satoshi Morita, Katsuhiro Morikawa, Kouichi Mizunaga | 2023-04-25 |
| 11551945 | Substrate processing apparatus including periphery cover body | Katsuhiro Morikawa, Satoshi Morita, Kouichi Mizunaga | 2023-01-10 |
| 11532492 | Substrate processing apparatus and substrate processing method | Katsuhiro Morikawa | 2022-12-20 |
| 11510284 | Substrate processing apparatus | Satoshi Morita, Katsuhiro Morikawa, Kouichi Mizunaga, Kouzou Kawahara | 2022-11-22 |
| 11208725 | Substrate processing apparatus | Kouichi Mizunaga, Satoshi Morita, Katsuhiro Morikawa | 2021-12-28 |
| 9953852 | Liquid processing aparatus | Jiro Higashijima, Yuichi Douki, Shigehisa Inoue | 2018-04-24 |
| 9508569 | Substrate liquid processing apparatus | Shigehisa Inoue, Jiro Higashijima | 2016-11-29 |
| 8408158 | Coating/developing device and method | Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2013-04-02 |
| 8302556 | Coating and developing apparatus | Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2012-11-06 |
| 7998308 | Liquid processing apparatus | Satoshi Kaneko, Kazuhisa Matsumoto, Norihiro Ito, Takayuki Toshima, Hiromitsu Nanba | 2011-08-16 |
| 7849864 | Liquid processing system | Kazuhisa Matsumoto, Satoshi Kaneko, Takayuki Toshima, Norihiro Ito | 2010-12-14 |
| 7838801 | Heating apparatus, heating method, coating apparatus, and storage medium | Osamu Hirakawa, Shinichi Hayashi | 2010-11-23 |
| 7797855 | Heating apparatus, and coating and developing apparatus | Tetsuo Fukuoka, Takahiro Kitano, Yoshio Kimura, Shinichi Hayashi, Hikaru Ito | 2010-09-21 |
| 7793609 | Coating and developing apparatus | Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2010-09-14 |
| 7793610 | Liquid processing apparatus | Takayuki Toshima, Satoshi Kaneko, Kazuhisa Matsumoto, Norihiro Ito, Hiromitsu Nanba | 2010-09-14 |
| 7766566 | Developing treatment apparatus and developing treatment method | Takahiro Kitano, Shuuichi Nishikido, Dai Kumagai | 2010-08-03 |
| 7758340 | Heating device and heating method | Shinichi Hayashi, Naruaki Iida, Hiroaki Inadomi | 2010-07-20 |
| 7322756 | Coating and developing apparatus and coating and developing method | Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka | 2008-01-29 |
| 7287920 | Semiconductor manufacturing apparatus and method | Shinichi Hayashi, Tsunenaga Nakashima, Suguru Enokida, Nobuaki Matsuoka | 2007-10-30 |
| 7281869 | Coating and developing system and coating and developing method | Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2007-10-16 |
| 7267497 | Coating and developing system and coating and developing method | Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2007-09-11 |
| 7245348 | Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning | Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2007-07-17 |