Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10946419 | Foreign substance removal apparatus and foreign substance detection apparatus | Yoshitaka Otsuka | 2021-03-16 |
| 10422875 | Fastening member, and obstacle detecting device employing fastening member | — | 2019-09-24 |
| 10160015 | Foreign substance removal apparatus and foreign substance detection apparatus | Yoshitaka Otsuka | 2018-12-25 |
| 10071544 | Separation apparatus, separation system, and separation method | Masaru Honda, Akira Fukutomi, Takeshi Tamura, Jiro Harada, Kazutaka Noda +1 more | 2018-09-11 |
| 9956755 | Separation method, separation apparatus, and separation system | Masaru Honda, Xavier Francois Brun, Charles Singleton | 2018-05-01 |
| 9919509 | Peeling device, peeling system and peeling method | Naoto Yoshitaka, Masaru Honda, Xavier Francois Brun, Charles Singleton | 2018-03-20 |
| 9827756 | Separation apparatus, separation system, and separation method | Masaru Honda, Xavier Francois Brun, Charles Singleton | 2017-11-28 |
| 9823341 | Ultrasonic sensor | Takashi Tsuji | 2017-11-21 |
| 9679798 | Substrate conveyance apparatus and substrate peeling system | Yasuharu Iwashita, Yasutaka SOMA, Takeshi Tamura, Kazutaka Noda, Xavier Francois Brun +1 more | 2017-06-13 |
| 9620099 | Ultrasonic transducer device and method of attaching the same | — | 2017-04-11 |
| 9613797 | Cleaning device, peeling system, cleaning method and computer-readable storage medium | Takashi Sakaue, Hiroshi KOMEDA, Katsuhiro Iino | 2017-04-04 |
| 9343349 | Substrate holding apparatus and substrate holding method | Yasuharu Iwashita, Eiji Manabe, Takeshi Tamura, Akira Fukutomi | 2016-05-17 |
| 9330898 | Separation system, separation method, program and computer storage medium | Naoto Yoshitaka, Masataka Matsunaga, Norihiko Okamoto | 2016-05-03 |
| 9296350 | Ultrasonic wave device | Yasushi Nagano, Takashi Tsuji | 2016-03-29 |
| 8997822 | Substrate inverting device, substrate inverting method, and peeling system | Yasuharu Iwashita, Masaru Honda, Akira Fukutomi | 2015-04-07 |
| 8997821 | Delamination system | — | 2015-04-07 |
| 8490856 | Joint apparatus, joint method, and computer storage medium | — | 2013-07-23 |
| 8330934 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Taro Yamamoto | 2012-12-11 |
| 7924402 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Taro Yamamoto | 2011-04-12 |
| 7838801 | Heating apparatus, heating method, coating apparatus, and storage medium | Masami Akimoto, Shinichi Hayashi | 2010-11-23 |
| 7697110 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Taro Yamamoto | 2010-04-13 |
| 7530749 | Coater/developer and coating/developing method | Taro Yamamoto | 2009-05-12 |
| 5089305 | Coating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by state | Mitsuru Ushijima, Masami Akimoto, Yoshio Kimura, Noriyuki Anai | 1992-02-18 |
| 5061144 | Resist process apparatus | Masami Akimoto, Yoshio Kimura, Noriyuki Anai, Masanori Tateyama, Yasuhiro Sakamoto | 1991-10-29 |
| 5028955 | Exposure apparatus | Yasushi Hayashida, Noriyuki Anai, Masami Akimoto, Yasuhiro Sakamoto, Keisuke Shigaki +1 more | 1991-07-02 |