Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424502 | Substrate transfer device and bonding system | Masataka Matsunaga, Takahiro Masunaga, Takashi Koga, Shingo Katsuki, Masaaki Umitsuki +2 more | 2019-09-24 |
| 9679798 | Substrate conveyance apparatus and substrate peeling system | Osamu Hirakawa, Yasutaka SOMA, Takeshi Tamura, Kazutaka Noda, Xavier Francois Brun +1 more | 2017-06-13 |
| 9595462 | Peeling system | Takeshi Tamura, Akira Fukutomi, Masaaki Umitsuki | 2017-03-14 |
| 9343349 | Substrate holding apparatus and substrate holding method | Osamu Hirakawa, Eiji Manabe, Takeshi Tamura, Akira Fukutomi | 2016-05-17 |
| 9165758 | Peeling system, peeling method, and computer storage medium | Naoto Yoshitaka, Masataka Matsunaga | 2015-10-20 |
| 8997822 | Substrate inverting device, substrate inverting method, and peeling system | Osamu Hirakawa, Masaru Honda, Akira Fukutomi | 2015-04-07 |
| 8795463 | Joint system, joint method, program and computer storage medium | Takahiro Nishibayashi, Takeshi Tamura, Tatsuya Kitayama | 2014-08-05 |
| 7573054 | Edge exposure apparatus, coating and developing apparatus, and edge exposure method | Ichiro Shimomura | 2009-08-11 |