Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12157293 | Separating method, separating apparatus, and separating system | Takashi Terada, Yuji Mimura, Hiroshi Maeda, Kazutaka Noda, Masaru Honda +3 more | 2024-12-03 |
| 10071544 | Separation apparatus, separation system, and separation method | Osamu Hirakawa, Masaru Honda, Takeshi Tamura, Jiro Harada, Kazutaka Noda +1 more | 2018-09-11 |
| 9595462 | Peeling system | Takeshi Tamura, Yasuharu Iwashita, Masaaki Umitsuki | 2017-03-14 |
| 9343349 | Substrate holding apparatus and substrate holding method | Yasuharu Iwashita, Osamu Hirakawa, Eiji Manabe, Takeshi Tamura | 2016-05-17 |
| 8997822 | Substrate inverting device, substrate inverting method, and peeling system | Yasuharu Iwashita, Osamu Hirakawa, Masaru Honda | 2015-04-07 |
| 8356951 | Wet-processing apparatus | Yasuaki Noda, Takafumi Hayama | 2013-01-22 |
| 7179504 | Substrate processing method and substrate processing system | Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Naoya Hirakawa, Nobukazu Ishizaka | 2007-02-20 |
| 6824616 | Substrate processing method and substrate processing system | Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Naoya Hirakawa, Nobukazu Ishizaka | 2004-11-30 |
| 6773510 | Substrate processing unit | Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Naoya Hirakawa, Nobukazu Ishizaka | 2004-08-10 |