Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394749 | Bonding system and surface modification method | Hiroshi Maeda, Takashi Terada, Masaru Honda, Ryoichi Sakamoto, Yutaka Yamasaki | 2025-08-19 |
| 12157293 | Separating method, separating apparatus, and separating system | Takashi Terada, Hiroshi Maeda, Kazutaka Noda, Masaru Honda, Ryoichi Sakamoto +3 more | 2024-12-03 |
| 11791182 | Measuring method and measuring device | Shigeto Tsuruta, Eiji Manabe, Hisanori Hizume | 2023-10-17 |
| 11626302 | Bonding method for cleaning non-bonding surface of substrate | Hiroshi Maeda, Satoshi Nishimura | 2023-04-11 |
| 11424142 | Bonding system with cleaning apparatus for cleaning non-bonding surface of substrate | Hiroshi Maeda, Satoshi Nishimura | 2022-08-23 |
| 11315789 | Method and structure for low density silicon oxide for fusion bonding and debonding | Kiyotaka Imai, Hirokazu Aizawa, Hiroshi Maeda, Kaoru Maekawa, Harunobu Suenaga | 2022-04-26 |
| 10340248 | Bonding systems | Masataka Matsunaga, Takashi Koga, Takeshi Tamura, Takahiro Masunaga, Masaru Honda +2 more | 2019-07-02 |
| 9741595 | Bonding method, storage medium, bonding apparatus and bonding system | Kenji Sugakawa, Shuhei Matsumoto, Takahiro Masunaga, Makoto Tsukishima | 2017-08-22 |
| 9401291 | Coating apparatus | Tetsuya Maki, Shigeto Tsuruta, Tatsumi Oonishi, Daisuke Ikemoto, Takahiro Masunaga | 2016-07-26 |