HS

Harunobu Suenaga

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,651,613 of 4,157,543Top 65%
1
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11315789 Method and structure for low density silicon oxide for fusion bonding and debonding Kiyotaka Imai, Hirokazu Aizawa, Hiroshi Maeda, Kaoru Maekawa, Yuji Mimura 2022-04-26