Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840213 | Bonding system | Takahiro Masunaga, Yasutaka SOMA, Takashi Koga, Shogo HARA, Masaaki Umitsuki +2 more | 2020-11-17 |
| 10424502 | Substrate transfer device and bonding system | Takahiro Masunaga, Takashi Koga, Yasuharu Iwashita, Shingo Katsuki, Masaaki Umitsuki +2 more | 2019-09-24 |
| 10340248 | Bonding systems | Takashi Koga, Takeshi Tamura, Takahiro Masunaga, Yuji Mimura, Masaru Honda +2 more | 2019-07-02 |
| 9607869 | Bonding system | Naoto Yoshitaka, Satoshi Nishimura | 2017-03-28 |
| 9330898 | Separation system, separation method, program and computer storage medium | Osamu Hirakawa, Naoto Yoshitaka, Norihiko Okamoto | 2016-05-03 |
| 9165758 | Peeling system, peeling method, and computer storage medium | Naoto Yoshitaka, Yasuharu Iwashita | 2015-10-20 |
| 6814809 | Coating and developing apparatus and pattern forming method | Michiaki Matsushita, Seiji Kozawa | 2004-11-09 |
| 6790681 | Substrate processing apparatus and substrate processing method | Akira Miyata, Yuichi Douki | 2004-09-14 |