Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077392 | Substrate transfer apparatus and substrate transfer method | Hitoshi Hashima, Tohru TOCHIHARA, Hidekazu Kiyama | 2024-09-03 |
| 11699608 | Substrate storage apparatus, substrate storage method, and recording medium | Akihiro Matsumoto, Akira Murata, Minoru Tashiro | 2023-07-11 |
| 10424499 | Apparatus, method and non-transitory storage medium for accommodating and processing a substrate | Akihiro Matsumoto, Satoru Shinto, Kazunori Kuratomi | 2019-09-24 |
| 9627237 | Apparatus, method and non-transitory storage medium for accommodating and processing a substrate | Akihiro Matsumoto, Satoru Shinto, Kazunori Kuratomi | 2017-04-18 |
| 8528889 | Device and method for supporting a substrate | Seiji Nakano, Naruaki Iida, Suguru Enokida, Katsuhiro Morikawa | 2013-09-10 |
| 8206076 | Substrate processing system | Issei Ueda, Yasushi Hayashida, Akira Miyata, Kensei Yamamoto, Yuichi Yamamoto | 2012-06-26 |
| 6874515 | Substrate dual-side processing apparatus | Akira Ishihara, Yukihiko Sakata | 2005-04-05 |
| 6814809 | Coating and developing apparatus and pattern forming method | Masataka Matsunaga, Seiji Kozawa | 2004-11-09 |
| 6319322 | Substrate processing apparatus | Issei Ueda, Kazuhiko Ito, Tadayuki Yamaguchi | 2001-11-20 |
| 5964954 | Double-sided substrate cleaning apparatus and cleaning method using the same | Hiroyuki Matsukawa, Akira Yonemizu, Akihiro Fujimoto, Takashi Takekuma, Hidetami Yaegashi +1 more | 1999-10-12 |
| 5686143 | Resist treating method | Hiroyuki Matsukawa, Akira Yonemizu, Akihiro Fujimoto, Takashi Takekuma, Hidetami Yaegashi +1 more | 1997-11-11 |
| 5518542 | Double-sided substrate cleaning apparatus | Hiroyuki Matsukawa, Akira Yonemizu, Akihiro Fujimoto, Takashi Takekuma, Hidetami Yaegashi +1 more | 1996-05-21 |
| 5498294 | Apparatus and method for washing substrates | Yutaka Yamahira | 1996-03-12 |
| 5421056 | Spin chuck and treatment apparatus using same | Kiyohisa Tateyama | 1995-06-06 |
| 5375291 | Device having brush for scrubbing substrate | Kiyohisa Tateyama | 1994-12-27 |