Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077392 | Substrate transfer apparatus and substrate transfer method | Hitoshi Hashima, Tohru TOCHIHARA, Michiaki Matsushita | 2024-09-03 |
| 11257701 | Substrate processing apparatus, substrate processing method and recording medium | Takehiro Kadokura, Kazutoshi Ishimaru, Takashige Suematsu | 2022-02-22 |
| 9082800 | Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium | Suguru Enokida, Masahiro Nakaharada, Naruaki Iida, Akira Miyata | 2015-07-14 |
| 8985929 | Substrate processing apparatus, substrate processing method and storage medium | Suguru Enokida, Masahiro Nakaharada, Akira Miyata, Naruaki Iida | 2015-03-24 |