Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359320 | Method of measuring a temperature of a heat plate and method thereof | Tsuyoshi Nogami | 2019-07-23 |
| 9984905 | Substrate treatment system, substrate transfer method and computer storage medium | Yoji Sakata, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2018-05-29 |
| 9984904 | Substrate treatment system, substrate transfer method and computer storage medium | Yoji Sakata, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2018-05-29 |
| 9460942 | Substrate treatment system, substrate transfer method and computer storage medium | Yoji Sakata, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2016-10-04 |
| 9287145 | Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium | Yoji Sakata, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Tsunenaga Nakashima | 2016-03-15 |
| 9082800 | Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium | Suguru Enokida, Hidekazu Kiyama, Naruaki Iida, Akira Miyata | 2015-07-14 |
| 8985929 | Substrate processing apparatus, substrate processing method and storage medium | Suguru Enokida, Akira Miyata, Hidekazu Kiyama, Naruaki Iida | 2015-03-24 |
| 8441618 | Substrate transfer method and apparatus | Naruaki Iida, Katsuhiro Morikawa, Suguru Enokida | 2013-05-14 |
| 7563042 | Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus | Seiki Ishida, Taro Yamamoto, Katsuhiro Morikawa | 2009-07-21 |
| 7284917 | Coating and developing system and coating and developing method | Seiki Ishida, Taro Yamamoto | 2007-10-23 |