Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359320 | Method of measuring a temperature of a heat plate and method thereof | Masahiro Nakaharada | 2019-07-23 |
| 10120394 | Processing liquid supply device, processing liquid supply method, and storage medium | — | 2018-11-06 |
| 9372405 | Chemical liquid supply method and chemical liquid supply system | Toshinobu Furusho, Takahiro Ookubo, Takashi Sasa | 2016-06-21 |
| 6744020 | Heat processing apparatus | Eiichi Shirakawa, Tetsuo Fukuoka | 2004-06-01 |