Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459339 | Resist pattern forming method, coating and developing apparatus and storage medium | Yoshio Kimura, Gousuke Shiraishi | 2019-10-29 |
| 10340140 | Substrate processing apparatus and substrate processing method | Masashi Itonaga | 2019-07-02 |
| 8933376 | Heating device, coating and developing system, heating method and storage medium | Takahiro Kitano, Kazuo Terada | 2015-01-13 |
| 8430967 | Hydrophobicizing apparatus, hydrophobicizing method and storage medium | Satoshi Shimmura, Takahiro Kitano | 2013-04-30 |
| 8326559 | Substrate processing system, system inspecting method, system inspecting program and recording medium storing the program recorded therein | — | 2012-12-04 |
| 8304020 | Adhesion promoting process, adhesion promoting device, coating and developing system and storage medium | Takahiro Kitano | 2012-11-06 |
| 8237092 | Apparatus and method for heating substrate and coating and developing system | Shinichi Hayashi, Tetsuya Oda, Hiroaki Inadomi | 2012-08-07 |
| 8217313 | Heating apparatus and heating method | Takahiro Kitano, Kazuo Terada | 2012-07-10 |
| 8080765 | Apparatus and method for heating substrate and coating and developing system | Shinichi Hayashi, Tetsuya Oda, Hiroaki Inadomi | 2011-12-20 |
| 8025925 | Heating apparatus, coating and development apparatus, and heating method | Takahiro Kitano, Nobuaki Matsuoka | 2011-09-27 |
| 7977609 | Temperature measuring device using oscillating frequency signals | Nobuyuki Sata, Takahiro Kitano, Toshiyuki Matsumoto, Tomohide Minami | 2011-07-12 |
| 7871265 | Heat treatment device | Takahiro Kitano, Kazuo Terada | 2011-01-18 |
| 7812285 | Apparatus and method for heating substrate and coating and developing system | Shinichi Hayashi, Tetsuya Oda, Hiroaki Inadomi | 2010-10-12 |
| 7797855 | Heating apparatus, and coating and developing apparatus | Masami Akimoto, Takahiro Kitano, Yoshio Kimura, Shinichi Hayashi, Hikaru Ito | 2010-09-21 |
| 6744020 | Heat processing apparatus | Eiichi Shirakawa, Tsuyoshi Nogami | 2004-06-01 |
| 5791521 | Liquid dispensing bag and quantitative chamber forming jig for liquid dispensing device | Masuo Kitamura, Kenji Ozawa, Kunio Yamada, Hajime Yamada | 1998-08-11 |
| 5346366 | Bladed rotor and apparatus for producing same | Shinsuke Eguchi, Masayuki Suzuki | 1994-09-13 |