Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9076643 | Supercritical processing apparatus, substrate processing system and supercritical processing method | Takayuki Toshima | 2015-07-07 |
| 8933376 | Heating device, coating and developing system, heating method and storage medium | Tetsuo Fukuoka, Takahiro Kitano | 2015-01-13 |
| 8434423 | Substrate carrying apparatus having circumferential sidewall and substrate processing system | Takayuki Toshima | 2013-05-07 |
| 8235061 | Substrate processing apparatus and substrate processing method | Takayuki Toshima, Kazuyuki Honda | 2012-08-07 |
| 8217313 | Heating apparatus and heating method | Tetsuo Fukuoka, Takahiro Kitano | 2012-07-10 |
| 8006636 | Substrate treatment apparatus | Kazuo Sakamoto, Takeshi Uehara | 2011-08-30 |
| 7871265 | Heat treatment device | Tetsuo Fukuoka, Takahiro Kitano | 2011-01-18 |
| 6756087 | Method for removing organic compound by ultraviolet radiation and apparatus therefor | — | 2004-06-29 |
| 6468599 | Method for removing organic compound by ultraviolet radiation | — | 2002-10-22 |
| 6329663 | Method and apparatus for cleaning a glass substrate for a color filter | — | 2001-12-11 |
| 6048767 | Method of forming a semiconductor memory device | — | 2000-04-11 |
| 5760452 | Semiconductor memory and method of fabricating the same | — | 1998-06-02 |
| 5616264 | Method and apparatus for controlling temperature in rapid heat treatment system | Katsuo Nishi, Wataru Ohkase, Kenichi Yamaga | 1997-04-01 |
| 5334257 | Treatment object supporting device | Hironobu Nishi | 1994-08-02 |
| 5324540 | System and method for supporting and rotating substrates in a process chamber | — | 1994-06-28 |
| 5061412 | Process for producing a magnet of strontium ferrite having high performance | Kunio Okumori | 1991-10-29 |
| 5053156 | Process for producing ferrite powder for ferrite magnets | Kunio Okumori | 1991-10-01 |
| 4706107 | IC memory cells with reduced alpha particle influence | Susumu Kurosawa, Shunichi Suzuki | 1987-11-10 |