Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829145 | Manufacturing method of heat insulation wall body and heat insulation wall body | Makoto Kobayashi | 2017-11-28 |
| 9790597 | Substrate processing apparatus, substrate processing method and storage medium | — | 2017-10-17 |
| 9466515 | Heat treatment furnace and heat treatment apparatus | Makoto Kobayashi, Akira Sasaki, Daisuke Ikeda, Takahiro KOIKE | 2016-10-11 |
| 9099505 | Thermal processing apparatus and cooling method | Yoshinori Kusakabe | 2015-08-04 |
| 8476560 | Thermal processing furnace | Makoto Kobayashi, Ken Nakao | 2013-07-02 |
| 8253075 | Heat treatment apparatus, heater, and method for manufacturing the heater | Makoto Kobayashi, Takanori Saito | 2012-08-28 |
| 8089031 | Heating apparatus for heating objects to be heated, heating method for heating the objects to be heated, and storage medium in which computer-readable program is stored | — | 2012-01-03 |
| 8080767 | Thermal processing apparatus and thermal processing method for object to be processed | Wenling Wang | 2011-12-20 |
| 8023806 | Heat processing furnace and vertical-type heat processing apparatus | Takashi Ichikawa, Makoto Kobayashi | 2011-09-20 |
| 7974525 | Heat processing furnace and vertical-type heat processing apparatus | Makoto Kobayashi, Takashi Ichikawa | 2011-07-05 |
| 7888622 | Heat-processing furnace and manufacturing method thereof | Ken Nakao, Makoto Kobayashi | 2011-02-15 |
| D604257 | Heater for semiconductor manufacturing | Yasuhiro Inatomi, Hiroyuki Honma | 2009-11-17 |
| 7528347 | Cooling device and heat treating device using the same | Takanori Saito | 2009-05-05 |
| 7479619 | Thermal processing unit | Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Tomohisa Shimazu +3 more | 2009-01-20 |
| 7311520 | Heat treatment apparatus | Takanori Saito, Ken Nakao | 2007-12-25 |
| 7150628 | Single-wafer type heat treatment apparatus for semiconductor processing system | Ken Nakao | 2006-12-19 |
| 7144823 | Thermal treatment apparatus | Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Tomohisa Shimazu +3 more | 2006-12-05 |
| 7102104 | Heat treatment system | Takanori Saito, Ken Nakao | 2006-09-05 |
| 6390754 | Wafer processing apparatus, method of operating the same and wafer detecting system | Yuji Ono, Masahiro Miyashita, Osamu Tanigawa | 2002-05-21 |
| 6369361 | Thermal processing apparatus | Takanori Saito, Tsuyoshi Takizawa | 2002-04-09 |
| 5884917 | Thermal processing apparatus | — | 1999-03-23 |
| 5829969 | Vertical heat treating apparatus | Masahiro Miyashita, Katsuhiko Mihara | 1998-11-03 |
| 5750436 | Thermal processing method and apparatus therefor | Yuichi Mikata, Akihito Yamamoto | 1998-05-12 |
| 5616264 | Method and apparatus for controlling temperature in rapid heat treatment system | Katsuo Nishi, Kazuo Terada, Wataru Ohkase | 1997-04-01 |
| 5578132 | Apparatus for heat treating semiconductors at normal pressure and low pressure | Toshiki Kobayashi | 1996-11-26 |