Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7344805 | Mask and method for producing thereof and a semiconductor device using the same | Hiroshi Kumano | 2008-03-18 |
| 6383897 | Apparatus for manufacturing a semiconductor device in a CVD reactive chamber | — | 2002-05-07 |
| 6211081 | Method of manufacturing a semiconductor device in a CVD reactive chamber | — | 2001-04-03 |
| 6188838 | Apparatus for heat treating a semiconductor wafer to reduce stress | Akihito Yamamoto | 2001-02-13 |
| 5893760 | Method of heat treating a semiconductor wafer to reduce stress | Akihito Yamamoto | 1999-04-13 |
| 5750436 | Thermal processing method and apparatus therefor | Kenichi Yamaga, Akihito Yamamoto | 1998-05-12 |
| 5484484 | Thermal processing method and apparatus therefor | Kenichi Yamaga, Akihito Yamamoto | 1996-01-16 |
| 5252133 | Vertically oriented CVD apparatus including gas inlet tube having gas injection holes | Shinji Miyazaki, Takahiko Moriya, Reiji Niino, Motohiko Nishimura | 1993-10-12 |