Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5637153 | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Reiji Niino, Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Toshiharu Nishimura +4 more | 1997-06-10 |
| 5580615 | Method of forming a conductive film on an insulating region of a substrate | Hitoshi Itoh | 1996-12-03 |
| 5380370 | Method of cleaning reaction tube | Reiji Niino, Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Toshiharu Nishimura +3 more | 1995-01-10 |
| 5252133 | Vertically oriented CVD apparatus including gas inlet tube having gas injection holes | Shinji Miyazaki, Yuichi Mikata, Reiji Niino, Motohiko Nishimura | 1993-10-12 |
| 5234869 | Method of manufacturing silicon nitride film | Yuuichi Mikata | 1993-08-10 |
| 5223455 | Method of forming refractory metal film | Hitoshi Itoh | 1993-06-29 |
| 5048800 | Vertical heat treatment apparatus | Shinji Miyazaki, Yasushi Yagi, Mituaki Komino, Katuhiko Iwabuchi | 1991-09-17 |
| 5015330 | Film forming method and film forming device | Katsuya Okumura, Shinji Miyazaki, Yoshio Kumagai, Susumu Tanaka | 1991-05-14 |
| 4957880 | Method for producing semiconductor device including a refractory metal pattern | Hitoshi Itoh | 1990-09-18 |
| 4746549 | Method for forming thin film of refractory material | Hitoshi Ito | 1988-05-24 |
| 4699801 | Semiconductor device | Hitoshi Ito | 1987-10-13 |
| 4650698 | Method of forming a thin film of a metal or metal compound on a substrate | Saburo Nakada | 1987-03-17 |
| 4597167 | Method of forming a metal film on a selectively diffused layer | Saburo Nakada | 1986-07-01 |
| 4582563 | Process for forming multi-layer interconnections | Yoshikazu Hazuki | 1986-04-15 |
| 4377438 | Method for producing semiconductor device | Yoshikazu Hazuki, Masahiro Kashiwagi | 1983-03-22 |
| 4283439 | Method of manufacturing a semiconductor device by forming a tungsten silicide or molybdenum silicide electrode | Iwao Higashinakagawa, Syohei Sima | 1981-08-11 |