Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620260 | Substrate rinsing and drying method | Takayuki Toshima | 2003-09-16 |
| 6001191 | Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus | Yuuji Kamikawa, Kinya Ueno, Naoki Shindo | 1999-12-14 |
| 5873177 | Spin dryer and substrate drying method | Yoshiyuki Honda | 1999-02-23 |
| 5845660 | Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus | Naoki Shindo, Yuuji Kamikawa, Shori Mokuo | 1998-12-08 |
| 5236515 | Cleaning device | Kinya Ueno | 1993-08-17 |
| 5188136 | Cleaning device | — | 1993-02-23 |
| 5015330 | Film forming method and film forming device | Katsuya Okumura, Takahiko Moriya, Shinji Miyazaki, Susumu Tanaka | 1991-05-14 |
| 4272964 | Steam generating apparatus | — | 1981-06-16 |