Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6001191 | Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus | Kinya Ueno, Naoki Shindo, Yoshio Kumagai | 1999-12-14 |
| 5887604 | Washing apparatus, and washing method | Shinya Murakami, Sinichiro Izumi, Noriyuki Anai, Takami Satoh, Hirofumi Shiraishi +3 more | 1999-03-30 |
| 5845660 | Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus | Naoki Shindo, Shori Mokuo, Yoshio Kumagai | 1998-12-08 |
| 5782990 | Method for washing objects | Shinya Murakami, Sinichiro Izumi, Noriyuki Anai, Takami Satoh, Hirofumi Shiraishi +3 more | 1998-07-21 |
| 5671764 | Washing apparatus, and washing method | Shinya Murakami, Sinichiro Izumi, Noriyuki Anai, Takami Satoh, Hirofumi Shiraishi +3 more | 1997-09-30 |
| 5445699 | Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surface | Kimiharu Matsumura, Masafumi Nomura, Junichi Nagata | 1995-08-29 |
| 5443540 | Apparatus and method for drying substrates | — | 1995-08-22 |
| 5431179 | Wafer drying apparatus and fire-extinguishing method therefor | Takanori Miyazaki, Kazuhiko Kobayashi, Chihaya Tashima | 1995-07-11 |
| 5369891 | Substrate drying apparatus | — | 1994-12-06 |
| 5370142 | Substrate washing device | Mitsuo Nishi, Takanori Miyazaki, Eiichi Mukai, Hiroshi Tanaka | 1994-12-06 |
| 5301700 | Washing system | Kouki Kuroda, Yoshiyuki Honda, Eiichi Mukai, Mitsuo Nishi | 1994-04-12 |
| 5253663 | Transfer apparatus | Hiroshi Tanaka, Mitsuo Nishi, Ryuichi Mizoguchi | 1993-10-19 |