Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5503171 | Substrates-washing apparatus | Kenji Yokomizo, Eiichi Mukai, Yoshiyuki Honda, Naohiko Hamamura, Shinya Murakami +1 more | 1996-04-02 |
| 5431179 | Wafer drying apparatus and fire-extinguishing method therefor | Takanori Miyazaki, Kazuhiko Kobayashi, Yuuji Kamikawa | 1995-07-11 |