Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Itaru Kanno, Hiromi Kiyose, Gentaro Goshi, Takuro Masuzumi, Kenji Sekiguchi +2 more | 2021-12-14 |
| 5503171 | Substrates-washing apparatus | Kenji Yokomizo, Chihaya Tashima, Eiichi Mukai, Yoshiyuki Honda, Shinya Murakami +1 more | 1996-04-02 |