Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6861371 | Substrate processing system and substrate processing method | Yuji Kamikawa | 2005-03-01 |
| 5503171 | Substrates-washing apparatus | Kenji Yokomizo, Chihaya Tashima, Yoshiyuki Honda, Naohiko Hamamura, Shinya Murakami +1 more | 1996-04-02 |
| 5370142 | Substrate washing device | Mitsuo Nishi, Takanori Miyazaki, Yuuji Kamikawa, Hiroshi Tanaka | 1994-12-06 |
| 5301700 | Washing system | Yuuji Kamikawa, Kouki Kuroda, Yoshiyuki Honda, Mitsuo Nishi | 1994-04-12 |