Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508588 | Substrate treatment device and substrate treatment method | — | 2022-11-22 |
| 11322371 | Substrate processing apparatus, substrate processing method and recording medium | — | 2022-05-03 |
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Itaru Kanno, Gentaro Goshi, Naohiko Hamamura, Takuro Masuzumi, Kenji Sekiguchi +2 more | 2021-12-14 |
| 11133176 | Substrate processing method, recording medium and substrate processing system | Kento Tsukano, Gentaro Goshi, Takuro Masuzumi, Shogo Fukui | 2021-09-28 |
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Gentaro Goshi, Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi +3 more | 2021-03-16 |
| 10619922 | Substrate processing apparatus, substrate processing method, and storage medium | Gentaro Goshi, Satoshi Biwa | 2020-04-14 |
| 10504718 | Substrate processing apparatus, substrate processing method, and storage medium | Hiroki Ohno, Keisuke Egashira, Gentaro Goshi, Yosuke Kawabuchi, Shotaro Kitayama +3 more | 2019-12-10 |
| 10395950 | Substrate processing apparatus, substrate processing method, and recording medium | Gentaro Goshi, Keisuke Egashira, Yosuke Kawabuchi, Takuro Masuzumi, Hiroki Ohno +3 more | 2019-08-27 |
| 10226959 | Substrate processing apparatus | Satoru Hiraki, Hiroshi Watanabe | 2019-03-12 |
| 10153182 | Substrate processing apparatus | Noboru Higashi, Satoru Hiraki, Hideaki Sato, Hiroshi Komiya | 2018-12-11 |
| 10037901 | Substrate liquid treatment apparatus, method of cleaning substrate liquid treatment apparatus and non-transitory storage medium | Kazuya Koyama, Katsufumi MATSUKI, Shuhei Takahashi, Hideki Nishimura, Takashi Uno +1 more | 2018-07-31 |
| 9953840 | Substrate processing method and substrate processing system | Hiroshi Marumoto, Hisashi Kawano, Mitsunori Nakamori, Kazuyuki Mitsuoka | 2018-04-24 |
| 9721813 | Liquid processing apparatus with cleaning jig | Nobuhiro Ogata, Hidetsugu Yano, Tsukasa Hirayama | 2017-08-01 |
| 8211810 | Substrate processing apparatus and substrate processing method for performing etching process with phosphoric acid solution | — | 2012-07-03 |
| 5401686 | Method of uniformly diffusing impurities into semiconductor wafers | — | 1995-03-28 |