HY

Hidetsugu Yano

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,496,154 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
9721813 Liquid processing apparatus with cleaning jig Nobuhiro Ogata, Hiromi Kiyose, Tsukasa Hirayama 2017-08-01
9224624 Liquid processing method Takao Inada, Naoyuki Okamura, Yosuke Hachiya 2015-12-29
8951359 Liquid processing apparatus, liquid processing method and computer-readable storage medium storing liquid processing program Takao Inada, Naoyuki Okamura, Yosuke Hachiya 2015-02-10