Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923220 | Substrate processing apparatus | Hirotaka Maruyama | 2024-03-05 |
| 10256163 | Method of treating a microelectronic substrate using dilute TMAH | Wallace P. Printz, Shuhei Takahashi, Masami Yamashita, Derek Bassett, Antonio Luis Pacheco Rotondaro | 2019-04-09 |
| 9627192 | Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program | Kazuki Kosai, Kazuhiro Teraoka, Fumihiro Kamimura | 2017-04-18 |
| 9598969 | Turbine, manufacturing method thereof, and power generating system | Kunihiko Wada, Satoru Kuboya, Daizo Saito, Hideyuki Maeda, Nobuhiro Okizono +2 more | 2017-03-21 |
| 9488051 | Axially balancing a turbine using low temperature exhaust | Hideyuki Maeda, Tsuguhisa Tashima, Shogo Iwai, Nobuhiro Okizono, Iwataro Sato +1 more | 2016-11-08 |
| 9399949 | Turbine | Nobuhiro Okizono, Iwataro Sato, Kazutaka Tsuruta, Akihiro Onoda | 2016-07-26 |
| 9224624 | Liquid processing method | Takao Inada, Hidetsugu Yano, Yosuke Hachiya | 2015-12-29 |
| 8951359 | Liquid processing apparatus, liquid processing method and computer-readable storage medium storing liquid processing program | Takao Inada, Hidetsugu Yano, Yosuke Hachiya | 2015-02-10 |
| 8906165 | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus | Teruomi Minami, Hirotaka Maruyama, Yosuke Kawabuchi | 2014-12-09 |
| 8545640 | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus | Teruomi Minami, Yosuke Kawabuchi | 2013-10-01 |
| 8002894 | Processing apparatus and processing method | Jiro Higashijima, Kousuke Maeda | 2011-08-23 |