Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300518 | Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquid | Hideaki Udou, Seiya Fujimoto, Yudai TAKANAGA, Takahito Nakashoya, Shogo Fukui +2 more | 2025-05-13 |
| 12027394 | Substrate processing method and substrate processing apparatus | Hiroki Sakurai, Kazuyoshi Shinohara | 2024-07-02 |
| 11862486 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Yoshihiro Kai, Gentaro Goshi, Hiroshi Komiya, Seiya Fujimoto, Takahisa Otsuka | 2024-01-02 |
| 11798819 | Liquid processing apparatus and liquid processing method | Yusuke Takamatsu, Taisei Inoue | 2023-10-24 |
| 11676835 | Substrate processing method and substrate processing apparatus | Hiroki Sakurai, Kazuyoshi Shinohara | 2023-06-13 |
| 11569086 | Substrate processing apparatus and substrate processing method | Kazuyoshi Shinohara | 2023-01-31 |
| 10770316 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Yoshihiro Kai, Gentaro Goshi, Hiroshi Komiya, Seiya Fujimoto, Takahisa Otsuka | 2020-09-08 |
| 10276408 | Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system | Michitaka Amiya, Takami Satoh, Kazuyoshi Eshima, Akihiro Nakamura, Koji Tanaka | 2019-04-30 |
| 9842751 | Substrate liquid processing apparatus | Shouta Umezaki, Yoshihiro Kai, Mitsuo Tanaka | 2017-12-12 |
| 9627192 | Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program | Naoyuki Okamura, Kazuhiro Teraoka, Fumihiro Kamimura | 2017-04-18 |
| 8475668 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein | Hiroshi Tanaka, Teruomi Minami, Yosuke Kawabuchi, Norihiro Ito, Fumihiro Kamimura +4 more | 2013-07-02 |
| 8303723 | Liquid processing apparatus, liquid processing method, and storage medium | Teruomi Minami, Fumihiro Kamimura, Takashi Yabuta, Kenji Yokomizo, Shogo Mizota | 2012-11-06 |