Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276408 | Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system | Takami Satoh, Kazuyoshi Eshima, Akihiro Nakamura, Koji Tanaka, Kazuki Kosai | 2019-04-30 |
| 8820335 | Cleaning apparatus, substrate processing system, cleaning method, program and storage medium | Kazuyoshi Eshima | 2014-09-02 |