Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276408 | Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system | Michitaka Amiya, Takami Satoh, Akihiro Nakamura, Koji Tanaka, Kazuki Kosai | 2019-04-30 |
| 9452397 | Liquid processing apparatus, liquid processing method, and storage medium that stores computer program for implementing liquid processing method | Hiroshi Komiya | 2016-09-27 |
| 8978670 | Substrate processing apparatus | Junya Minamida, Issei Ueda, Yasuhiro Chouno, Osamu Kuroda, Masahiro Yoshida +1 more | 2015-03-17 |
| 8820335 | Cleaning apparatus, substrate processing system, cleaning method, program and storage medium | Michitaka Amiya | 2014-09-02 |
| 8777695 | Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method | Hideaki Sato, Hiromi Hara, Hirozumi Hoshino | 2014-07-15 |
| 8670656 | Liquid heating unit, liquid processing apparatus including the same, and liquid processing method | Toshihiko Nishida, Hisakazu Nakayama | 2014-03-11 |
| 8652344 | Liquid treatment method and storage system | Kotaro Tsurusaki, Hiroshi Tanaka, Takayuki Toshima | 2014-02-18 |
| 8607730 | Method of replacing liquid of circulation line in substrate liquid processing apparatus of single-wafer type | — | 2013-12-17 |
| 8590548 | Liquid processing apparatus for substrate, method for generating processing liquid, and computer readable recording medium storing program for generating processing liquid therein | — | 2013-11-26 |
| 8408234 | Process liquid supply system, process liquid supply method, and storage medium | Keisuke Sasaki | 2013-04-02 |
| 8083857 | Substrate cleaning method and substrate cleaning apparatus | Tsukasa Watanabe, Naoki Shindo | 2011-12-27 |
| 7900640 | Cleaning apparatus including cleaning tank with improved cover | — | 2011-03-08 |
| 5370411 | Bicycle frame assembly | Kikuzo Takamiya, Nobuaki Shimada, Akira Dohi | 1994-12-06 |