Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322631 | Substrate processing system, substrate processing method, and recording medium | Takafumi Tsuchiya, Wataru Tsukinoki, Shuhei Goto | 2025-06-03 |
| 11062922 | Substrate liquid processing apparatus | Takashi Nagai, Hideaki Sato, Hiroshi Yoshida, Tsukasa Hirayama | 2021-07-13 |
| 11056360 | Substrate liquid processing apparatus and method, and computer-redable storage medium stored with substrate liquid processing program | Hideaki Sato, Jin Hyun Kim | 2021-07-06 |
| 10985035 | Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded therein | Hideaki Sato, Takahiro Kawazu, Takashi Nagai | 2021-04-20 |
| 10811266 | Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing program | Fumihiro Kamimura | 2020-10-20 |
| 10607849 | Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program | Hideaki Sato, Takashi Nagai | 2020-03-31 |
| 10460964 | Substrate liquid processing apparatus and method, and computer-readable storage medium stored with substrate liquid processing program | Hideaki Sato, Jin Hyun Kim | 2019-10-29 |
| 10032642 | Substrate liquid processing apparatus | Hideaki Sato, Takashi Nagai | 2018-07-24 |
| 9887092 | Etching method, etching apparatus, and storage medium | Takahiro Furukawa, Yusuke Futamata, Hideaki Sato, Takahiro Kawazu, Toshiyuki Shiokawa +1 more | 2018-02-06 |
| 8803039 | Heating unit, substrate processing apparatus, and method for heating fluid | Hideaki Sato | 2014-08-12 |
| 8777695 | Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method | Hideaki Sato, Kazuyoshi Eshima, Hirozumi Hoshino | 2014-07-15 |
| 6120222 | Machine tool | Kazuyuki Hiramoto, Naoshi Takayama, Naozumi Tanikawa | 2000-09-19 |
| 5192139 | Apparatus for cooling a spindle bearing of a machine | Kazuyuki Hiramoto, Akihiro Mochizuki | 1993-03-09 |