Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626277 | Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing system | Keiji Onzuka | 2023-04-11 |
| 10818532 | Substrate processing apparatus | Keiji Onzuka, Kouki Murakami | 2020-10-27 |
| 10770283 | Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing system | Keiji Onzuka | 2020-09-08 |
| 8777695 | Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method | Hideaki Sato, Kazuyoshi Eshima, Hiromi Hara | 2014-07-15 |