Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183613 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Kotaro Tsurusaki, Yoshihiro Kai | 2024-12-31 |
| 11978644 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Kotaro Tsurusaki, Yoshihiro Kai | 2024-05-07 |
| 11626277 | Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing system | Hirozumi Hoshino | 2023-04-11 |
| 11469114 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Kotaro Tsurusaki, Yoshihiro Kai | 2022-10-11 |
| 10818532 | Substrate processing apparatus | Kouki Murakami, Hirozumi Hoshino | 2020-10-27 |
| 10770283 | Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing system | Hirozumi Hoshino | 2020-09-08 |