Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183613 | Substrate processing system and substrate processing method | Kotaro Tsurusaki, Keiji Onzuka, Yoshihiro Kai | 2024-12-31 |
| 12087599 | Substrate processing apparatus and apparatus cleaning method | Hidemasa Aratake, Osamu Kuroda | 2024-09-10 |
| 12042815 | Substrate processing apparatus for supplying gas of water repellent agent and substrate processing method | Kotaro Tsurusaki, Koji Yamashita, Yusuke Yamamoto, Koji Tanaka | 2024-07-23 |
| 11978644 | Substrate processing system and substrate processing method | Kotaro Tsurusaki, Keiji Onzuka, Yoshihiro Kai | 2024-05-07 |
| 11745213 | Substrate processing apparatus and apparatus cleaning method | Hidemasa Aratake, Osamu Kuroda | 2023-09-05 |
| 11615971 | Substrate processing apparatus and processing liquid concentration method | Teruaki Konishi, Osamu Kuroda, Koji Tanaka, Kotaro Tsurusaki, Hidemasa Aratake +2 more | 2023-03-28 |
| 11476130 | Substrate processing apparatus, substrate processing method, and storage medium | Kotaro Tsurusaki, Koji Yamashita, Kazuya Koyama | 2022-10-18 |
| 11469114 | Substrate processing system and substrate processing method | Kotaro Tsurusaki, Keiji Onzuka, Yoshihiro Kai | 2022-10-11 |
| 11430675 | Substrate processing apparatus and processing liquid reuse method | Hideaki Sato, Junichi Kitano | 2022-08-30 |
| 6736556 | Substrate processing apparatus | — | 2004-05-18 |
| 6332724 | Substrate processing apparatus | Mitsuteru Yano, Norio Semba, Issei Ueda, Masami Akimoto, Kazuhiko Ohi | 2001-12-25 |