Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087599 | Substrate processing apparatus and apparatus cleaning method | Osamu Kuroda, Kouzou Kanagawa | 2024-09-10 |
| 11869780 | Substrate liquid processing apparatus | Takahiro Kawazu, Takafumi Tsuchiya, Hideaki Sato, Osamu Kuroda, Takashi Nagai +1 more | 2024-01-09 |
| 11745213 | Substrate processing apparatus and apparatus cleaning method | Osamu Kuroda, Kouzou Kanagawa | 2023-09-05 |
| 11615971 | Substrate processing apparatus and processing liquid concentration method | Teruaki Konishi, Kouzou Kanagawa, Osamu Kuroda, Koji Tanaka, Kotaro Tsurusaki +2 more | 2023-03-28 |
| 8251077 | Liquid processing apparatus, liquid processing method and storage medium | Norihiro Itoh | 2012-08-28 |
| 8201568 | Liquid treatment apparatus | Norihiro Ito | 2012-06-19 |