Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12202016 | Substrate cleaning apparatus, substrate cleaning method, and non-transitory computer-readable recording medium | Yuki Ito | 2025-01-21 |
| 11826794 | Substrate cleaning apparatus, substrate cleaning method, and non-transitory computer-readable recording medium | Yuki Ito | 2023-11-28 |
| 9396975 | Liquid treatment apparatus and method | Jiro Higashijima | 2016-07-19 |
| 9245737 | Liquid treatment apparatus and liquid treatment method | Kazuhiro Aiura | 2016-01-26 |
| 9190311 | Liquid arm cleaning unit for substrate processing apparatus | Jiro Higashijima, Yosuke Hachiya, Kazuhiro Aiura, Naoki Shindo, Yuki Ito | 2015-11-17 |
| 9105671 | Liquid processing apparatus and liquid processing method | Kazuhiro Aiura | 2015-08-11 |
| 9064908 | Substrate liquid processing apparatus, liquid processing method, and storage medium | Kazuhiro Aiura | 2015-06-23 |
| 8865483 | Substrate processing apparatus and substrate processing method | Kazuhiro Aiura, Yusuke Hashimoto, Takashi Nagai | 2014-10-21 |
| 8607807 | Liquid treatment apparatus and method | Jiro Higashijima | 2013-12-17 |
| 8444772 | Liquid processing apparatus | Hiromitsu Nanba | 2013-05-21 |
| 8393227 | Substrate processing method, storage medium storing program for executing the same, substrate processing apparatus, and fault detection method for differential pressure flowmeter | Hiroyuki Kudoh | 2013-03-12 |
| 8251077 | Liquid processing apparatus, liquid processing method and storage medium | Hidemasa Aratake | 2012-08-28 |
| 8246759 | Substrate processing apparatus, substrate processing method, and program storage medium | Jiro Higashijima | 2012-08-21 |