Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381094 | Substrate processing apparatus and substrate processing method | Ryo Kuwajima, Hirofumi Yamaguchi | 2025-08-05 |
| 12283489 | Etching method and etching apparatus | Satoshi TODA, Mitsuhiro Tachibana, Haruna Suzuki, Gen You | 2025-04-22 |
| 12272541 | Etching method and etching apparatus | Gen You, Haruna Suzuki | 2025-04-08 |
| 11764070 | Etching method and etching apparatus | Satoshi TODA, Haruna Suzuki, Gen You | 2023-09-19 |
| 11335567 | Etching method and etching apparatus | Ryo Kuwajima, Satoshi TODA | 2022-05-17 |
| 10700166 | Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus | Yoshihiro Kai, Shinya Ishikawa, Yuji Kamikawa, Shuichi Nagamine | 2020-06-30 |
| 10535528 | Method of forming titanium oxide film and method of forming hard mask | Toshio Hasegawa, Naotaka Noro, Miyako Kaneko | 2020-01-14 |
| 9922849 | Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof | Yasuyuki Ido, Takehiko Orii, Keisuke Egashira, Yosuke Hachiya, Kotaro Ooishi +2 more | 2018-03-20 |
| 9768010 | Liquid treatment apparatus | Norihiro Ito, Kazuhiro Aiura, Yosuke Hachiya | 2017-09-19 |
| 9691602 | Liquid process apparatus and liquid process method | Norihiro Ito, Kazuhiro Aiura, Yosuke Hachiya, Takashi Nagai | 2017-06-27 |
| 9358588 | Substrate cleaning method, substrate cleaning system and program storage medium | Tsukasa Watanabe, Takahiro Furukawa, Yuji Kamikawa | 2016-06-07 |
| 9280642 | Method of managing clinical testing apparatus, clinical testing system, and maintenance management apparatus | Yusuke Suga, Atsumasa Sone, Hiroyuki Koyama, Shunsuke Ariyoshi | 2016-03-08 |
| 9202731 | Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein | Shigeru Kasai, Ayuta Suzuki, Ikuo Sawada, Masatake Yoneda, Kazuhiro Ooya | 2015-12-01 |
| 9190311 | Liquid arm cleaning unit for substrate processing apparatus | Jiro Higashijima, Yosuke Hachiya, Kazuhiro Aiura, Norihiro Itoh, Yuki Ito | 2015-11-17 |
| 9177838 | Liquid process apparatus and liquid process method | Norihiro Ito, Kazuhiro Aiura, Yosuke Hachiya, Takashi Nagai | 2015-11-03 |
| 8868370 | Sample analyzing system, sample analyzer and management apparatus | Yusuke Suga, Aya Konishi, Daigo Fukuma, Keisuke Kuwano | 2014-10-21 |
| 8449684 | Substrate cleaning method, substrate cleaning system and program storage medium | Tsukasa Watanabe | 2013-05-28 |
| 8347901 | Substrate cleaning method, substrate cleaning system and program storage medium | Tsukasa Watanabe, Takahiro Furukawa, Yuji Kamikawa | 2013-01-08 |
| 8303724 | Substrate processing method and non-transitory storage medium for carrying out such method | Koukichi Hiroshiro, Yuji Kamikawa, Takayuki Toshima | 2012-11-06 |
| 8197606 | Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage medium | Tsukasa Watanabe, Hiroki Ohno, Kenji Sekiguchi | 2012-06-12 |
| 8152928 | Substrate cleaning method, substrate cleaning system and program storage medium | Tsukasa Watanabe, Koukichi Hiroshiro, Yuji Kamikawa | 2012-04-10 |
| 8090585 | Audio decoding device | Hideyuki Kakuno | 2012-01-03 |
| 8083857 | Substrate cleaning method and substrate cleaning apparatus | Tsukasa Watanabe, Kazuyoshi Eshima | 2011-12-27 |
| 8015984 | Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent | Koukichi Hiroshiro, Yuji Kamikawa, Takayuki Toshima | 2011-09-13 |
| 7897498 | Method for manufacturing semiconductor device | Glenn W. Gale, Yoshihiro Hirota, Yusuke Muraki, Genji Nakamura, Masato Kushibiki +3 more | 2011-03-01 |