Issued Patents All Time
Showing 25 most recent of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198947 | Substrate cleaning method and substrate cleaning device | — | 2025-01-14 |
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Gentaro Goshi, Keisuke Egashira, Yosuke Kawabuchi, Hiroshi Marumoto +3 more | 2021-03-16 |
| 10923368 | Substrate processing apparatus, substrate processing method, and storage medium | Takao Inada, Hisashi Kawano | 2021-02-16 |
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Gentaro Goshi, Keisuke Egashira, Hiroshi Marumoto, Takuro Masuzumi +2 more | 2020-06-23 |
| 10651061 | Substrate processing apparatus, substrate processing method and recording medium | Takao Inada, Hisashi Kawano | 2020-05-12 |
| 10504718 | Substrate processing apparatus, substrate processing method, and storage medium | Keisuke Egashira, Gentaro Goshi, Yosuke Kawabuchi, Shotaro Kitayama, Hiroshi Marumoto +3 more | 2019-12-10 |
| 10395950 | Substrate processing apparatus, substrate processing method, and recording medium | Gentaro Goshi, Keisuke Egashira, Yosuke Kawabuchi, Hiromi Kiyose, Takuro Masuzumi +3 more | 2019-08-27 |
| 10207349 | High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container | Kazuyuki Mitsuoka, Gen You, Takehiko Orii, Takayuki Toshima, Hiroaki Inadomi | 2019-02-19 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +4 more | 2019-02-05 |
| 10115609 | Separation and regeneration apparatus and substrate processing apparatus | Kazuyuki Mitsuoka, Takehiko Orii, Takayuki Toshima | 2018-10-30 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +3 more | 2018-10-09 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Gen You, Takehiko Orii, Takayuki Toshima | 2018-08-14 |
| 9881784 | Substrate processing method, substrate processing apparatus, and storage medium | Keiji Tanouchi, Kazuyuki Mitsuoka, Takehiko Orii, Takayuki Toshima | 2018-01-30 |
| 9662685 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Gen You, Takehiko Orii, Takayuki Toshima | 2017-05-30 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2017-02-28 |
| D748226 | Rotary valve | Kazuhiro Aoki | 2016-01-26 |
| D746411 | Valve element for rotary valve | Kazuhiro Aoki | 2015-12-29 |
| 8794250 | Substrate processing method and substrate processing apparatus | Takehiko Orii, Kenji Sekiguchi, Noritaka Uchida, Satoru Tanaka | 2014-08-05 |
| 8771429 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2014-07-08 |
| 8747689 | Liquid processing method, liquid processing apparatus and storage medium | Takehiko Orii | 2014-06-10 |
| 8372212 | Supercritical drying method and apparatus for semiconductor substrates | Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Hidekazu Hayashi, Yukiko Kitajima +5 more | 2013-02-12 |
| 8337659 | Substrate processing method and substrate processing apparatus | Takehiko Orii, Kenji Sekiguchi, Noritaka Uchida, Satoru Tanaka | 2012-12-25 |
| 8197606 | Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage medium | Tsukasa Watanabe, Naoki Shindo, Kenji Sekiguchi | 2012-06-12 |
| 8147617 | Substrate cleaning method and computer readable storage medium | Kenji Sekiguchi | 2012-04-03 |
| 8137478 | Substrate processing method and substrate processing apparatus | Kenji Sekiguchi, Noritaka Uchida, Satoru Tanaka | 2012-03-20 |